JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 12, NO. 6, DECEMBER 2003 761 Etch Rates for Micromachining Processing—Part II Kirt R. Williams, Senior Member, IEEE, Kishan Gupta, Student Member, IEEE, and Matthew ...
http://engineering.dartmouth.edu/microeng/processing/LocalAccess/ JMEMSEtchRates2(2003).pdf - 1051.5KB

Data in the following Table are from "Etch Rates for Micromachining Processing" by K. Williams and R. Muller (Journal of MEMS, Vol. 5, No. 4, Dec 1996) Wet Etch Rates for Micromachining and IC Processing (Å/min) ...
http://engineering.dartmouth.edu/microeng/processing/etching/ Wet_Etch_Table.html - 14.8KB

Dartmouth Micromachining Curriculum Development Publications C. G. Levey, "The Science and Technology of Micro-machines: Development of an Undergraduate Course and Summer Workshop. II. Micro-machine Laboratory Work ...
http://engineering.dartmouth.edu/microeng/publications/henning/ micromachinecurriculum.html - 1.9KB

ES65 Student Project CAD layouts Geoff Dolan: Microfluidic Devices Peter Han, Geoff Zawtocki, Bob Halk: Cell Impedance Probe Steve Hubbard, Zander Lichstein, Patrick Riehl: micromirror array Student layout files ( ...
http://engineering.dartmouth.edu/microeng/courses/es65/projects/ projects.html - 0.7KB

Overview of ENGS 85 - The Science of Micromachines Spring 2001 Levey The course will be organized as a reading course with labs. Following some introductory lectures, reading will be assigned in the core areas below. ...
http://engineering.dartmouth.edu/microeng/levey/levey.courses/ es85.html - 3.9KB

L-Edit for the Macintosh MACINTOSH KEYSERVER FILES at Dartmouth: (6 keys) L-Edit folder: L-Edit, ledit.tdb, Supp L-Edit Install (includes samples) (2 keys) L-Edit/DRC folder: L-Edit, ledit.tdb, Supp L-Edit/DRC ...
http://engineering.dartmouth.edu/microeng/ledit/ledit.mac.html - 1.7KB

Micromachining WWW Journal Club Below are summaries and links explored by the Dartmouth summer micromachining workshop students in a WWW journal club. www club June 28 EG&G / IC Sensors: pressure and acceleration ...
http://engineering.dartmouth.edu/microeng/courses/workshop/www.club/ - 1.4KB

Undergraduate Curriculum Micromachining Curriculum Development Publications list. The Science and Technology of Micromachines Surface Micromachining Lab Bulk Micromachining Lab student SEM images Student ...
http://engineering.dartmouth.edu/microeng/undergradlab.html - 3.5KB

Anisotropic Etching Anisotropic Etching Local use only, see Ethanolamine results. See also O. Tabata, R. Asahi, H. Funabashi, K. Shimaoka, and S. Sugiyama, Anisotropic etching of silicon in TMAH solutions, Sensors ...
http://engineering.dartmouth.edu/microeng/processing/etching/ anisotropic.html - 4.0KB

Dartmouth Thayer School Stress Engineered Microsystems Dartmouth Thayer School Stress Engineered Microsystems A new technique of creating out-of-plane microstructures has been devised at the Dartmouth Thayer School of ...
http://engineering.dartmouth.edu/microeng/sems.html - 2.7KB